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Aerosol-assisted Chemical Vapor Deposition von Metall-Oxid-Strukturen
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Aerosol-assisted Chemical Vapor Deposition von Metall-Oxid-Strukturen: Zinkoxid-Stangen

Article DOI: 10.3791/56127-v • 06:39 min • September 14th, 2017
September 14th, 2017 •
1,2, 3, 4, 1, 1
1Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 2SIX Research Centre, Brno University of Technology, 3Institute of Physics of Material, Academy of Science of Czech Republic, 4Institute of Physical Engineering and Central European Institute of Technology, Brno University of Technology

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Säulenförmigen Zinkoxid Strukturen in Form von Stäben über Aerosol-gestützte chemische Aufdampfen ohne den Einsatz der bereits hinterlegten Katalysator-Samen Partikel synthetisiert. Diese Methode ist skalierbar und kompatibel mit verschiedenen Substraten, basierend auf Silikon, Quarz oder Polymere.

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Chemie Ausgabe 127 Zinkoxid säulenartigen Strukturen Stangen AACVD nicht-katalysierten Wachstum Dampf-Solid-Mechanismus
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