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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
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JoVE Journal Engineering
Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

DOI:
10.3791/60648-v

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07:23 min

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February 05, 2020

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1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine,University of California San Diego

Chapters

  • 00:05Introduction
  • 00:54Nano-height Channel Mask Preparation
  • 01:53Nano-height Channel Fabrication
  • 02:49Room Temperature Plasma-activated Bonding
  • 04:56Experimental Setup and Testing
  • 05:54Results: Representative Fluid Capillary Filling and Surface Acoustic Wave (Saw)-Induced Fluid Draining
  • 06:45Conclusion

Summary

Automatic Translation

Automatic Translation

We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.

Tags

Nanoheight ChannelsSurface Acoustic WaveLithium NiobateAcoustic NanofluidicsNanofabricationPlasma BondingPhotolithographyReactive Ion EtchingChromium EtchingSolvent Cleaning

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