使用二次离子质谱法重建分离杂质的 3D 深度剖面
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April 29, 2020
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所提出的方法描述了如何识别和解决与二次离子质谱相关的测量伪影，以及如何获得固态材料中杂质/掺杂剂的真实 3D 分布。
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Cite this Article
Michałowski, P. P., Zlotnik, S., Jóźwik, I., Chamryga, A., Rudziński, M. 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry. J. Vis. Exp. (158), e61065, doi:10.3791/61065 (2020).
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