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晶圆级试验站上SiN集成光学相控阵列的特性
JoVE Journal
Engineering
This content is Free Access.
JoVE Journal
Engineering
Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Please note that all translations are automatically generated.
Click here for the English version.
晶圆级试验站上SiN集成光学相控阵列的特性
DOI:
10.3791/60269-v
•
05:57 min
•
April 01, 2020
•
Nicola A. Tyler
,
Sylvain Guerber
,
Daivid Fowler
,
Stephane Malhouitre
,
Stephanie Garcia
,
Philippe Grosse
,
Bertrand Szelag
1
University Grenoble Alpes and CEA, LETI, Minatec Campus
Chapters
00:05
Introduction
00:36
Optical Coupling: Fiber Alignment
01:25
Optical Coupling: Optical Phase Array (OPA) Output Imaging
02:14
Beam Optimization and Steering
04:05
Beam Divergence Measurement Imaging
04:30
Results: Representative Silicon Nitride (SiN) Integrated OPA Characterization
05:20
Conclusion
Summary
Automatic Translation
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Automatic Translation
在这里,我们描述了包含光学相控阵列的SiN集成光子电路的运行情况。这些电路用于在近红外发射低发散激光束,并引导它们以两维。
Tags
SiN Integrated Optical Phased Arrays
Wafer-scale Characterization
Automated Testing
Beam-steering Circuits
Prober Station
Grating Coupler
Far-field Imaging
Phase Control
Beam Steering
Ring Resonators
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