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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
 

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Article doi: 10.3791/53630
July 5th, 2016

Summary July 5th, 2016

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

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