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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
JoVE Journal
Engineering
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JoVE Journal Engineering
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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10:28 min

July 05, 2016

DOI:

10:28 min
July 05, 2016

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Summary

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We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

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