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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
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Bioengineering
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JoVE Journal Bioengineering
Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

DOI:
10.3791/55276-v

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10:18 min

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January 27, 2017

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, ,
1Department of Bioengineering,Stanford University, 2Microfluidic Foundry,Stanford University, 3Department of Genetics,Stanford University, 4Chem-H Institute,Stanford University

Chapters

  • 00:05Title
  • 00:51Rounded Valve Fabrication
  • 03:08Fabricating Variable Height Features in Tandem
  • 05:50Production of Hydrogel Beads from Droplets
  • 08:29Results: Production of PEG-diacrylate Hydrogel Droplets
  • 09:34Conclusion

Summary

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Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.

Tags

Multi-step PhotolithographyValved Microfluidic DevicesMultilayer MicrofluidicsOn-chip Membrane ValvesMicrofluidic Master Mold FabricationSU-8 PhotoresistAZ 50XT PhotoresistUV Mask AlignerSoft BakeHard BakePhotoresist Development

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