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JoVE Journal
Bioengineering

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Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices
 

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

Article DOI: 10.3791/55276-v 10:18 min January 27th, 2017
January 27th, 2017

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Summary

Multilayer microfluidic devices often involve the fabrication of master molds with complex geometries for functionality. This article presents a complete protocol for multi-step photolithography with valves and variable height features tunable to any application. As a demonstration, we fabricate a microfluidic droplet generator capable of producing hydrogel beads.

Tags

Multi-step Variable Height Photolithography Valved Multilayer Microfluidic Devices Master Molds On-chip Valves Complex Geometries Flow Control Biological Applications Visual Demonstration Photomasks SU-8 2050 Negative Photoresist AZ 50XT Positive Photoresist
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