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Lys Enhanced Flussyre Acid Passivering
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Lys Enhanced Flussyre Acid Passivering: En følsom teknik til påvisning af Bulk Silicon Fejl

Article DOI: 10.3791/53614-v 09:15 min January 4th, 2016
January 4th, 2016



Please note that all translations are automatically generated.

Click here for the English version.

En RT væskeoverfladen passivering teknik til at undersøge rekombinationsaktivitet af bulk silicium defekter er beskrevet. For teknikken at være en succes, er tre kritiske trin kræves: (i) kemisk rensning og ætsning af silicium, (ii) neddypning af silicium i 15% flussyre og (iii) belysning til 1 min.


Engineering Bulk levetid defekter flussyre belysning passivering photoconductance rekombination.
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