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Radio Frequency Magnetron Sputtering of GdBa2Cu3O7−δ/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates
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JoVE Journal Engineering
Radio Frequency Magnetron Sputtering of GdBa2Cu3O7−δ/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7−δ/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates

DOI:
10.3791/58069-v

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06:49 min

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April 12, 2019

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, , , , , , , , , ,
1Department of Physics, Mathematics, Shanghai Key Laboratory of Materials Protection and Advanced Materials in Electric Power,Shanghai University of Electric Power, 2Key Laboratory of Artificial Structure and Quantum Control, Ministry of Education, Department of Physics,Shanghai Jiao Tong University, 3Shanghai Institute of Space Power-sources, 4Shanghai Key Laboratory of High Temperature Superconductors,Shanghai University

Chapters

  • 00:04Title
  • 00:57Substrate and Target Preparation
  • 02:29LSMO Nanoparticle Deposition
  • 03:36GdBa2Cu3O7″δ Film Deposition
  • 04:24Results: Growth of LSMO Nanoparticles and Gd (BCO) Films on SrTiO3 (STO) Single-crystal Substrates
  • 06:07Conclusion

Summary

Automatic Translation

Automatic Translation

Here, we present a protocol to grow LSMO nanoparticles and (Gd) BCO films on (001) SrTiO3 (STO) single-crystal substrates by radio frequency (RF)-sputtering.

Tags

Keywords: Radio Frequency Magnetron SputteringGdBa2Cu3O7-δ/La0.67Sr0.33MnO3Quasi-bilayer FilmsSrTiO3 SubstratesLSMO NanoparticlesVacuum DepositionThin Film GrowthSuperconducting FilmsMagnetron SputteringSubstrate PreparationThin Film Characterization

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