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用于原子化和抗波流体的厚度模式压电器件的制造和特性
 
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用于原子化和抗波流体的厚度模式压电器件的制造和特性

Article DOI: 10.3791/61015-v 10:39 min August 5th, 2020
August 5th, 2020

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Summary

Please note that all translations are automatically generated.

Click here for the English version.

介绍了通过锂硝酸锂板电极的直流溅射制造压电厚度模式传感器。此外,通过传感器支架和流体供应系统实现了可靠的操作,通过阻抗分析、激光多普勒振动测量、高速成像和激光散射液滴尺寸分布,可以证明表征。

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Tags

工程,第162期,荧光素,硝酸锂,雾化,激光多普勒振动测量,高速成像,雾化器
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