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Journal / Engineering / 通过雕刻包含可重入和双重入的腔或柱的气体镶入微纹理来渲染 SiO2/Si…
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Engineering

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JoVE Journal Engineering
通过雕刻包含可重入和双重入的腔或柱的气体镶入微纹理来渲染 SiO2/Si 曲面全功能性
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通过雕刻包含可重入和双重入的腔或柱的气体镶入微纹理来渲染 SiO2/Si 曲面全功能性

Article DOI: 10.3791/60403-v • 08:02 min • February 11th, 2020
February 11th, 2020 •
1, 1, 1, 1, 2, 2, 1
1Water Desalination and Reuse Center (WDRC), Biological and Environmental Science and Engineering (BESE) Division, King Abdullah University of Science and Technology (KAUST), 2Core Labs, King Abdullah University of Science and Technology (KAUST)

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本作品提出了微加工方案，用于使用光刻和干蚀刻在SiO 2/Si晶圆上实现具有可重入和双重入型的腔和柱。产生的微纹理表面表现出显著的液体排斥性，其特点是在润湿液体下对空气进行长期粘固，尽管二氧化硅具有固有的润湿性。

Tags

工程，第 156 期，润湿、全通、可重入和双重入腔/柱、气动微纹理 （GEM）、光刻、各向异性蚀刻、各向异性蚀刻、热氧化物生长、反应电蚀刻、接触角、浸入式、共聚焦显微镜
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