Engineering
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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Chapters
Summary July 17th, 2015
The use of electron channeling contrast imaging in a scanning electron microscope to characterize defects in III-V/Si heteroexpitaxial thin films is described. This method yields similar results to plan-view transmission electron microscopy, but in significantly less time due to lack of required sample preparation.
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