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Journal / Engineering / Silikon Üzerine Epitaxial Nanoyapılı α-Kuvars…
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Silikon Üzerine Epitaxial Nanoyapılı α-Kuvars Filmler
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Silikon Üzerine Epitaxial Nanoyapılı α-Kuvars Filmler: Malzemeden Yeni Cihazlara

Article DOI: 10.3791/61766-v • 11:34 min • October 6th, 2020
October 6th, 2020 •
1, 1, 1, 1, 1
1Institut d'Electronique et des Systemes (IES), CNRS, Université de Montpellier

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Bu çalışma, difleme kaplama yöntemi ile kuvars filminin epitaksiyel büyümesinden başlayarak silikon-on-insulatör (SOI) teknolojisi alt tabaka üzerinde nanoyapılı α-kuvars kantileatörün mikrofabrikasyonu ve daha sonra nanoimprint litografi ile ince filmin nanoyapılanması için ayrıntılı bir protokol sunun.

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Mühendislik Sayı 164 nanoimprint litografi (NIL) nanoyapılı α kuvars SOI substrat piezoelektrik mikrofabrikasyon litografi gravür kantilever MEMS
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