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Teoretisk beregning og eksperimentel verifikation for dislokationsreduktion i germaniumepitaksiale lag med semicylindriske hulrum på silicium
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Teoretisk beregning og eksperimentel verifikation for dislokationsreduktion i germaniumepitaksiale lag med semicylindriske hulrum på silicium

Article DOI: 10.3791/58897-v • 06:57 min • July 17th, 2020
July 17th, 2020 •
1, 2, 1, 1,3
1Department of Materials Engineering, The University of Tokyo, 2Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 3Department of Materials Science and Engineering, Massachusetts Institute of Technology

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Teoretisk beregning og eksperimentel verifikation foreslås til en reduktion af gevinddislokationstæthed (TD) i germaniumepitaksiale lag med semicylindriske hulrum på silicium. Beregninger baseret på interaktionen mellem TD'er og overflade via billedkraft, TD-målinger og transmissionselektronmikroskopobservationer af TD'er præsenteres.

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Engineering Silicium fotonik germanium Ge krystalvækst selektiv epitaksial vækst gevind dislokation tæthed billedkraft teoretisk beregning kemisk dampaflejring CVD transmission elektron mikroskop TEM
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