Waiting
Login processing...

Trial ends in Request Full Access Tell Your Colleague About Jove
Journal / Engineering / Herstellung von uniformen Nanoschuppen-Cavities…
JoVE Journal
Engineering

A subscription to JoVE is required to view this content.

JoVE Journal Engineering
Herstellung von uniformen Nanoschuppen-Cavities über Silicon Direct Wafer Bonding
Concrete Sample Image Acquisition to Extract Concrete Characteristics (Video) | JoVE
Journal (Engineering)
Concrete Sample Image Acquisition to Extract Concrete Characteristics (Video) | JoVE
Detection and Recovery of Palladium, Gold and Cobalt Metals from the Urban Mine Using Novel Sensors/Adsorbents Designated with Nanoscale Wagon-wheel-shaped Pores
Journal (Engineering)
Detection and Recovery of Palladium, Gold and Cobalt Metals from the Urban Mine Using Novel Sensors/Adsorbents Designated with Nanoscale Wagon-wheel-shaped Pores
 
Click here for the English version

Herstellung von uniformen Nanoschuppen-Cavities über Silicon Direct Wafer Bonding

Article DOI: 10.3791/51179-v • 10:32 min • January 9th, 2014
January 9th, 2014 •
1, 2,3, 4, 5, 1
1Department of Physics, The State University of New York at Buffalo, 2Joint Quantum Institute, University of Maryland, 3The National Institute of Standards and Technology, 4Cryogenics and Fluids Branch, NASA Goddard Space Flight Center, 5HRL Laboratories

Chapters

Summary
Automatic Translation

Please note that all translations are automatically generated.

Click here for the English version.

Beschrieben wird ein Verfahren zum dauerhaften Verkleben von zwei Siliziumwafern, um ein einheitliches Gehäuse zu realisieren. Dazu gehören Wafervorbereitung, Reinigung, RT-Bindung und Glühprozesse. Die resultierenden gebundenen Wafer (Zellen) haben eine Gleichmäßigkeit des Gehäuses von 1%1,2. Die resultierende Geometrie ermöglicht Messungen von geschlossenen Flüssigkeiten und Gasen.

Tags

Physik Ausgabe 83 Silizium-Direktwaferbindung Nanoskalige gebundene Wafer Siliziumwafer begrenzte Flüssigkeiten lithographische Techniken
Read Article

Get cutting-edge science videos from JoVE sent straight to your inbox every month.

Waiting X
Simple Hit Counter