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高效宽量程可调谐 MEMS 滤波器的设计与表征方法
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Please note that all translations are automatically generated.
Click here for the English version.
高效宽量程可调谐 MEMS 滤波器的设计与表征方法
DOI:
10.3791/56371-v
•
15:25 min
•
February 04, 2018
•
Hasan Goktas
1
Department of Electrical and Electronic Engineering
,
Harran University
Chapters
00:00
Title
02:51
Selecting and Designing Optimum Structure
03:31
Modeling and Fabrication on CMOS
05:39
Device Testing: Thermal Camera Test for Embedded Heaters
06:27
Device Testing: Calibrating LDV and Test Setup
09:19
Device Testing: Testing 68μm Long MEMS Filters via LDV
10:32
Device Testing: Higher Mode Measurement
11:01
Avoiding Device Failures
11:45
Avoiding Failures: High Thermal Stress and Burning
12:10
Boosting The Tuning Capability
13:16
Results
14:07
Conclusion
Summary
Automatic Translation
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Automatic Translation
本文提出了一种利用激光多普勒测 (LDV) 进行固定波束设计的协议, 包括频率调谐的测量、调谐能力的修正以及设备故障和迟滞的避免。LDV 方法在网络分析仪上的优越性是由于其较高的模态能力而表现出来的。
Tags
MEMS Filters
Wide Range Tunable
CMOS MEMS
Network Analyzer
Laser Doppler Vibrometer
Resonance Characterization
Frequency Tuning
Fixed-fixed Beam
Stiction
Temperature Coefficient Of Frequency
Thermal Expansion
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