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Summary
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氧化锌薄膜晶体管(TTs)氧化铝介电层生长的阳极化参数各不相同,以确定对电气参数响应的影响。方差分析 (ANOVA) 应用于 Plackett-Burman 实验设计 (DOE),以确定导致器件性能优化的制造条件。