Waiting
Login processing...

Trial ends in Request Full Access Tell Your Colleague About Jove
Journal / Engineering / Epitel nanostruktureret α-kvartsfilm på silicium: …
JoVE Journal
Engineering

A subscription to JoVE is required to view this content. Sign in or start your free trial.

JoVE Journal Engineering
Epitel nanostruktureret α-kvartsfilm på silicium
Optimization of Airflow Velocities in Battery Cooling Systems for Enhanced Thermal Performance and Reduced Energy Consumption (Video) | JoVE
Journal (Engineering)
Optimization of Airflow Velocities in Battery Cooling Systems for Enhanced Thermal Performance and Reduced Energy Consumption (Video) | JoVE
How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters
Journal (Engineering)
How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters
 
Click here for the English version

Epitel nanostruktureret α-kvartsfilm på silicium: Fra materialet til nye enheder

Article DOI: 10.3791/61766-v • 11:34 min • October 6th, 2020
October 6th, 2020 •
1, 1, 1, 1, 1
1Institut d'Electronique et des Systemes (IES), CNRS, Université de Montpellier

Chapters

Summary
Automatic Translation

Please note that all translations are automatically generated.

Click here for the English version.

Dette arbejde præsenterer en detaljeret protokol for mikrofabrikation af nanostruktureret α-kvarts cantilever på en Silicon-On-Insulator (SOI) teknologi substrat startende fra den epitaxiale vækst af kvarts film med dip belægning metode og derefter nanostrukturering af den tynde film via nanoimprint litografi.

Tags

Teknik Udgave 164 nanoimprint litografi (NIL) nanostruktureret α-kvarts SOI substrat piezoelektrisk mikrofabrikation litografi ætsning cantilever MEMS
Read Article

Get cutting-edge science videos from JoVE sent straight to your inbox every month.

Waiting X
Simple Hit Counter