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金属辅助多孔硅和固体硅晶圆的电化学纳米压印
JoVE Journal
Engineering
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JoVE Journal Engineering
Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers

金属辅助多孔硅和固体硅晶圆的电化学纳米压印

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09:18 min

February 08, 2022

DOI:

09:18 min
February 08, 2022

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Summary

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提出了一种金属辅助化学印迹的方案,将形状精度低于20 nm的3D微尺度特征印制到固体和多孔硅晶圆中。

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