Journal
/
Chemistry
/
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
JoVE Journal
Chemistry
This content is Free Access.
JoVE Journal Chemistry
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

DOI:
10.3791/61065-v

•

07:10 min

•

April 29, 2020

•

, , , ,
1Łukasiewicz Research Network-Institute of Electronic Materials Technology

Chapters

  • 00:00Introduction
  • 00:57Defect Selective Etching
  • 02:09Scanning Electron Microscopy
  • 02:50Secondary Ion Mass Spectrometry
  • 05:34Results: Oxygen Counts in a Cuboid
  • 06:29Conclusion

Summary

Automatic Translation

Automatic Translation

The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.

Tags

Keywords: 3D Depth ProfileSegregated ImpuritiesSecondary Ion Mass SpectrometrySemiconductor TechnologyStructural DefectsEutectic MixtureDefect-selective EtchingGallium NitrideScanning Electron MicroscopySIMS Calibration

Article

Embed

ADD TO PLAYLIST

Usage Statistics

Related Videos

check_url/61065?article_type=v

Analyzing Protein Dynamics Using Hydrogen Exchange Mass Spectrometry
check_url/61065?article_type=v

Analyzing the Photo-oxidation of 2-propanol at Indoor Air Level Concentrations Using Field Asymmetric Ion Mobility Spectrometry
check_url/61065?article_type=v

An HS-MRM Assay for the Quantification of Host-cell Proteins in Protein Biopharmaceuticals by Liquid Chromatography Ion Mobility QTOF Mass Spectrometry
check_url/61065?article_type=v

Real-time Breath Analysis by Using Secondary Nanoelectrospray Ionization Coupled to High Resolution Mass Spectrometry
check_url/61065?article_type=v

Synthesis and Mass Spectrometry Analysis of Oligo-peptoids
check_url/61065?article_type=v

An Efficient Sample Preparation Method to Enhance Carbohydrate Ion Signals in Matrix-assisted Laser Desorption/Ionization Mass Spectrometry
check_url/61065?article_type=v

Large-scale Top-down Proteomics Using Capillary Zone Electrophoresis Tandem Mass Spectrometry
check_url/61065?article_type=v

High-throughput and Comprehensive Drug Surveillance Using Multisegment Injection-Capillary Electrophoresis-Mass Spectrometry
check_url/61065?article_type=v

Imaging Corrosion at the Metal-Paint Interface Using Time-of-Flight Secondary Ion Mass Spectrometry
check_url/61065?article_type=v

Ion Mobility-Mass Spectrometry Techniques for Determining the Structure and Mechanisms of Metal Ion Recognition and Redox Activity of Metal Binding Oligopeptides

Read Article